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In 2023, we completed integrating our new SiC team. We’ve solidified our position in the SiC epitaxy market, it’s now our fastest-growing product line.

The PE2O8 silicon carbide (SiC) tool uses an epitaxy process to deposit the SiC materials on either bare wafers or as part of the transistor device fabrication process.

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Our PE1O6A and PE1O8 silicon carbide (SiC) tools use an epitaxy process to deposit the SiC materials on either bare wafers or as part of the transistor device fabrication process.

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Atomic Layer Deposition, or ALD, is one of our technological solutions that works at a tiny level to make a huge difference.

Our SiC tools use an epitaxy process to deposit the SiC materials, either on bare substrates or as part of the transistor device fabrication process. Because of its wide band gap, SiC is highly efficient at high voltages, offering higher power efficiency and increased power density, resulting in reduced component weight and size and faster battery-charging times.

Epitaxy, often called Epi, is the process of depositing highly controlled silicon-based crystalline films, a critical process technology for creating advanced transistors and memories, and for wafer manufacturing.

The SiC epitaxy equipment market is growing fast due to the growing electrification of the automotive industry, with vehicle-power electronics transitioning from silicon to SiC-based materials. SiC devices allow electric vehicles to have longer battery life and a greater range.

From the Netherlands to Malaysia, from Phoenix to Korea. Explore our open roles to join our world of groundbreaking innovations.

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At ASM, we have been an innovation leader for more than 50 years. We haven’t only contributed to the remarkable advance of the semiconductor industry; we’ve shaped the industry itself.

Vertical furnaces offer very high productivity solutions for a wide range of thermal processes including low pressure chemical vapor deposition (LPCVD), diffusion and oxidation.

At ASM, we are committed to continuously developing new innovations in process and equipment technologies to meet our customers’ needs.

We have a proven track record of innovation, spanning a wide range of equipment and process technologies now used by the world’s leading semiconductor manufacturers.

This site uses cookies and related technologies to let this site operate to its full potential, to better understand your preferences, personalize content and advertising, and to provide social media and other third party features. More information about the cookies we use and your options are included in our Cookie Notice.