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The fill rate above assumes that the material is fully melted and does not take into account packing density. It should be noted that the crucible liner may need to be loaded multiple times, pre-melted, and topped off in order to achieve the final desired melt level/fill rate. When loading the crucible, do not load more than 80% of the height of the crucible liner.

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Instructions for use: Select source type, input distance from source to substrate and Select Material (if not available in menu, manually input Material Density in kg/m3).

We estimate a deposition rate of 2-5 angstroms per second when the evaporation temperature is at ~2,100°C. A partial pressure of O2 at 1 X 10-5 Torr is recommended. It is important to note that evaporation temperatures likely exceed the temperatures reasonable to evaporate via resistive heating.

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KJLC recommends a fill rate between 67-75%. Overfilling the crucible will cause the material to spill over and create an electrical short between the liner and the hearth causing the crucible to crack. Placing too little material in the crucible or allowing the melt level to get too low can be detrimental to the process as well. When the melt level is below 30%, the e-beam is likely to strike the bottom or walls of the crucible which immediately results in breakage.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.

Another process note is to consider the fill volume in the e-beam application because we find that the melt level of a material in a crucible directly affects the success of the crucible liner. Overfilling the crucible will cause the material to spill over and create an electrical short between the liner and the hearth. The outcome is cracking in the crucible. This is the most common cause of crucible liner failure. Placing too little material in the crucible or allowing the melt level to get too low can be detrimental to the process as well. When the melt level is below 30%, the e-beam is likely to strike the bottom or walls of the crucible which immediately results in breakage. Our recommendation is to fill the crucible between 2/3 and 3/4 full to prevent these difficulties.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.

Because not using a crucible liner is not always an option (especially in shared systems), some customers will use a copper crucible liner and place the material in the copper crucible liner as opposed to placing directly in the hearth. Crucible liners should be stored in a cool, dry place and always handled with gloves or forceps.

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Thermally evaporating aluminum oxide is very difficult due to the high temperature required to heat the material to temperatures hot enough to allow for reasonable deposition rates. The temperature limitations on the evaporation sources currently available also make thermal evaporation challenging. E-beam evaporation or sputtering are the preferred methods for depositing aluminum oxide films.

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Instructions for use: Input the Crucible Liner Volume, Select Material (if not available in menu, manually input Material Density in g/cm3), and input fill rate %.

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If thermal evaporation is the only option, we would recommend a tungsten dimple boat such as our EVS8B005W. The lifetime of the boat will be limited, as the aluminum oxide will eventually start to react with the boat during the evaporation process. Achieving high enough temperatures to evaporate from a crucible or alumina-coated source are likely in excess of those temperatures deemed reasonable in a vacuum chamber or limited by the power supply.

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

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This calculator is for estimation purposes only. The estimated mass is that needed to produce a desired film thickness (1 micron in this case) on a flat substrate at a point directly above the source, accounting for the approximate plume distribution of the selected source type. It does not account for any expected nonuniformity in thickness over a larger substrate area. More complex geometries, e.g. those with offset and/or tilted sources, may have higher material requirements. The estimated mass is for the film deposition only; additional margin should be included to account for loss during ramp-up, burn-in, stabilisation and ramp-down.

Aluminum oxide, or more commonly called alumina, is a chemical compound with a chemical formula of Al2O3. It is generally white or clear in appearance with a melting point of 2,072°C, a vapor pressure of 10-4 Torr at 1,550°C, and a density of 3.97 g/cc. It is most commonly found in nature as the mineral corundum, from which ruby and sapphire are derived. Aluminum oxide is used extensively as an abrasive and is utilized in various industrial applications. It can also be found in paint, cosmetics, and surgical implants. It is evaporated under vacuum to form dielectric films for the semiconductor industry and as a mirror-like protective layer for optical coatings.

Sweep the e-beam at low power to fully melt the material and avoid hole drilling. We estimate a deposition rate of 2-5 angstroms per second when the evaporation temperature is at ~2,100°C. A partial pressure of O2 at 1 X 10-5 Torr is recommended. The material should be replaced when it becomes dark or black.

E-beam evaporation is preferred for depositing aluminum oxide films as the material is rated excellent for this method. We recommend evaporating from a FABMATE® or tungsten crucible liner or directly from the copper hearth.